Hole mobility degradation by remote Coulomb scattering and charge distribution in Al2O3/GeOxgate stacks in bulk Ge pMOSFET with GeOxgrown by ozone oxidation
2017
期刊
Journal of Physics D: Applied Physics
作者
Lixing Zhou
· Xiaolei Wang
· Xueli Ma
· Jinjuan Xiang
· Hong Yang
· Chao Zhao
· Tianchun Ye
· Wenwu Wang
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- 卷 50
- 期 24
- 页码 245102
- IOP Publishing
- ISSN: 0022-3727
- DOI: 10.1088/1361-6463/aa6f96