Thermal Reliability Tests of Air-Gap TSVs With Combined Air-SiO2Liners - M.AI.N GROUP | LabXing

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Thermal Reliability Tests of Air-Gap TSVs With Combined Air-SiO2Liners

2016

期刊 IEEE Transactions on Components, Packaging and Manufacturing Technology

作者 Cui Huang · Dong Wu · Zheyao Wang

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卷 6
期 5
页码 703-711
Institute of Electrical and Electronics Engineers (IEEE)
ISSN: 2156-3950
DOI: 10.1109/tcpmt.2016.2544761

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