Experimental investigation on oxidation kinetics of germanium by ozone - 铁电器件课题组（王晓磊） | LabXing

array(2) { ["lab"]=> string(4) "1352" ["publication"]=> string(5) "11883" } Experimental investigation on oxidation kinetics of germanium by ozone - 铁电器件课题组（王晓磊） | LabXing

铁电器件课题组（王晓磊）

简介半导体存储器件

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Experimental investigation on oxidation kinetics of germanium by ozone

2016

期刊 Applied Surface Science

作者 Xiaolei Wang · Zhiqian Zhao · Jinjuan Xiang · Wenwu Wang · Jing Zhang · Chao Zhao · Tianchun Ye

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卷 390
页码 472-480
Elsevier BV
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2016.08.123

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