Comprehensive investigation of the interfacial charges and dipole in GeO x /Al2O3 gate stacks of Ge MOS capacitor by postdeposition annealing
2018
期刊
Japanese Journal of Applied Physics
作者
Lixing Zhou
· Xiaolei Wang
· Xueli Ma
· Kai Han
· Yanrong Wang
· Jinjuan Xiang
· Hong Yang
· Jing Zhang
· Chao Zhao
· Tianchun Ye
· Wenwu Wang
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- 卷 57
- 期 10
- 页码 101101
- IOP Publishing
- ISSN: 0021-4922
- DOI: 10.7567/jjap.57.101101