Comprehensive understanding of the effect of electric dipole at high-k/SiO2 interface on the flatband voltage shift in metal-oxide-semiconductor device
2010
期刊
Applied Physics Letters
作者
Xiaolei Wang
· Kai Han
· Wenwu Wang
· Xueli Ma
· Dapeng Chen
· Jing Zhang
· Jun Du
· Yuhua Xiong
· Anping Huang
下载全文
- 卷 97
- 期 6
- 页码 062901
- AIP Publishing
- ISSN: 0003-6951
- DOI: 10.1063/1.3475774