Identification of a suitable passivation route for high-k/SiGe interface based on ozone oxidation
2019
期刊
Applied Surface Science
作者
Xueli Ma
· Lixing Zhou
· Jinjuan Xiang
· Hong Yang
· Xiaolei Wang
· Yongliang Li
· Jing Zhang
· Chao Zhao
· Huaxiang Yin
· Wenwu Wang
· Tianchun Ye
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- 卷 493
- 页码 478-484
- Elsevier BV
- ISSN: 0169-4332
- DOI: 10.1016/j.apsusc.2019.07.050